A brief review of atomic layer deposition: from fundamentals to applications - ScienceDirect
Atomic/molecular layer deposition for energy storage and conversion - Chemical Society Reviews (RSC Publishing) DOI:10.1039/D0CS00156B
C | Free Full-Text | Atomic Layer Deposition of Nanolayered Carbon Films | HTML
Atomic Layer Deposition in Nanopores | InRedox
The effect of surface preparation on the protective properties of Al2O3 and HfO2 thin films deposited on cp-titanium by atomic layer deposition - ScienceDirect
Smoothing surface roughness using Al2O3 atomic layer deposition - ScienceDirect
Surface smoothing effect of an amorphous thin film deposited by atomic layer deposition on a surface with nano-sized roughness: AIP Advances: Vol 4, No 2
Low-temperature remote plasma enhanced atomic layer deposition of ZrO2/zircone nanolaminate film for efficient encapsulation of flexible organic light-emitting diodes | Scientific Reports
Surface morphology and crystallinity control in the atomic layer deposition (ALD) of hafnium and zirconium oxide thin films
Simulation of ALD layer growth on a rough surface. The initial surface... | Download Scientific Diagram
Atomic Layer Deposition of Iridium Using a Tricarbonyl Cyclopropenyl Precursor and Oxygen | Chemistry of Materials
Frontiers | Impact of Atomic Layer Deposition to Nanophotonic Structures and Devices
Eindhoven University of Technology MASTER Surface smoothing using atomic layer deposition and etching Gerritsen, S.H.
Quantum-dot array with a random rough interface encapsulated by atomic layer deposition
Thickness scaling of atomic-layer-deposited HfO2 films and their application to wafer-scale graphene tunnelling transistors | Scientific Reports
The effect of surface preparation on the protective properties of Al2O3 and HfO2 thin films deposited on cp-titanium by atomic layer deposition - ScienceDirect
Schematic of nanoconfined atomic layer deposition (ALD) of TiO 2 /Pt... | Download Scientific Diagram
Catalysts | Free Full-Text | Atomic Layer Deposition for Preparation of Highly Efficient Catalysts for Dry Reforming of Methane | HTML
Lithium metal protected by atomic layer deposition metal oxide for high performance anodes - Journal of Materials Chemistry A (RSC Publishing)
Atomic Layer Deposition of 2D Metal Dichalcogenides for Electronics, Catalysis, Energy Storage, and Beyond - Mattinen - 2021 - Advanced Materials Interfaces - Wiley Online Library
How Atomic Layer Deposition Works
C | Free Full-Text | Atomic Layer Deposition of Nanolayered Carbon Films | HTML
Atomic layer–deposited nanostructures and their applications in energy storage and sensing | Journal of Materials Research | Cambridge Core
